Capacitive Distance Sensor
• Sub-nanometer Spatial Resolution
• Multi-channel High-speed Parallel Data Acquisition
• Compatible with Extreme Operational Environments Including Ultra-high Vacuum (UHV) and Completely Non-magnetic Conditions
0.2 ~ 3 mm
Wide Measuring Range
UHV
Ultra-high Vacuum Compatible
≤ ±0.01% FSO
High Linearity
Sub-nm
Ultra-high Resolution
50 kSa/s
Data Acquisition & Transmission Bandwidth
Sensor
Multiple Measuring Ranges & Diverse Installation Forms
Three types of sensor are provided, namely Flat, Cylindrical and Cylindrical with thread,
covering range 0.2 mm, 0.5 mm, 1 mm, 2 mm & 3 mm.
Options for high vacuum(.HV), ultra-high vacuum(.UHV) & completely non-magnetic material(.NM) are available.
Measuring Range ➠
0.2 mm
0.5 mm
1 mm
2 mm
3 mm
Flat sensors
. FLT
C0.2-FLT
C0.5-FLT
C1-FLT
C2-FLT
C3-FLT
Cylindrical sensors
. CYL
C0.2-CYL
C0.5-CYL
C1-CYL
C2-CYL
C3-CYL
Cylindrical sensors
with thread
. SCR
C0.2-SCR
C0.5-SCR
C1-SCR
C2-SCR
C3-SCR
* Capable of accommodating special operating environments, including ultra-high vacuum (.UHV), completely non-magnetic (.NM), and cryogenic (.Cryo) requirements
Technical Parameters
Choose the Better Fit
Sensor·Basic Information
1
Sensor Type
Flat .FLT
Cylindrical .CYL
Cylindrical with thread .SCR
2
Mounting Method
Screw
M1.6/ M2/ M2.5
Clamping
Φ 8 mm
Thread
M 10 × 1
3
Cable Connection
Integrated
Plug
Plug
4
Shell Material
Ti
5
Measuring Range 1
0.2 mm
0.5 mm
1 mm
2 mm
3 mm
6
Linearity 2
± 0.02 um
± 0.05 um
± 0.10 um
± 0.20 um
± 0.30 um
7
Sensitivity 3
50 V/mm
20 V/mm
10 V/mm
5 V/mm
3.33 V/mm
8
Resolution 4
Dynamic 5
Static 6
4 nm
0.2 nm
10 nm
0.5 nm
20 nm
1 nm
40 nm
2 nm
60 nm
3 nm
Monitor·Technical Data
9
Bandwidth
10 kHz / 1 kHz / 20 Hz
10
Linearity
± 0.01 % FSO 7
11
Resolution
Dynamic @ 10 kHz
0.002 % FSO
Static @ 20 Hz
0.0001 % FSO
12
Sensitivity Deviation
± 0.01 %
13
Repeatability
0.0003 % FSO
14
Temperature Stability
10 ppm/℃
15
Output
Software-side
Hardware-side
Software FaradayRead
The default software directly displays distance and supports advanced functions such as real-time spectrum analysis and mathematical formula processing
Secondary Development Kit
Labview, C & C#
Analog Output Interface
BNC connector:0~10V (default);
±5V、±10V (available)
Digital Output Interface
Ethernet, EtherCAT ; SPI (available)
16
Data Rate
Analog
Max. 10 kHz @ -3 dB
Digital
50 kSa/s × 8 channels
17
No. of Channels
Max. 8
18
Synchronous Operation
Feasible synchronization between multiple monitors
1. Measuring Range, Maximum measurement distance of the sensor probe.
2. Linearity, an industry-standard parameter, reflects the absolute accuracy of sensor measurements under factory calibration conditions.
3. Sensitivity, an industry-standard parameter, refers to the ratio of the sensor system’s output change to the input change – specifically, the magnitude of the output voltage corresponding to a unit displacement.
4. Resolution, an industry-standard parameter, refers to the minimum displacement increment measurable under a specific bandwidth, given as the RMS noise value.
5. Dynamic (resolution), refers to the resolution at a 10 kHz bandwidth.
6. Static (resolution), refers to the resolution at a 20 Hz bandwidth.
7. FSO, an abbreviation for Full-Scale Output.
Monitor·Faraday Series
Up to 8 Channels with Flexible Configuration
Adjustable bandwidth selection, high-speed data acquisition
EtherNET Interface
Gigabit Ethernet Port
50 kSa/s × 8-channel
parallel data transmission
EtherCAT Interface
Multiple Faraday series monitors in cascade
Sync IN/OUT Interface
Synchronization of excitation signals between multiple monitors for measurements under non-grounded operating conditions
BNC Connector for Analog Output
Adjustable analog bandwidth at
10 kHz, 1 kHz & 20 Hz
The Faraday Series Position Monitor consists of two parts: the Main Uint (Box0X) & the
board (Faraday), with advanced expansion functions optionally available via plug-in boards.
0.3 – 3 Times
Customizable Range
Extension
0~10 V / ±5 V / ±10 V
Selectable Analog
Output Range
Adjustable Zero Position
Allows specifying any
position within the
measuring range as the
zero point
SPI Interface
Data update interval of
20 µs, plug-in expansion
Flexible Customization
Offering OEM Customization
Features · High-speed Data Acquisition
50 kSa/s Data Acquisition for High-speed Recording
of Impact Vibrations
Data originates from the planar vibrations induced by a single-pulse impact, without any blind spots throughout the entire motion-monitoring process.
Features · Software
Real-time FFT Analysis
Multi-channel Position Data Display
Sampling Rate Adjustable
FFT Analysis
Real-time Spectrum Analysis
Velocity & Acceleration Analysis
Real-time Differential Signal
Data Indexing
Automatic Peak/Valley Detection
Software Zeroing
Configure Digital Zero Point Anytime
Out-of-range Warning
Configurable Warning Conditions
Features · High-speed Real-time Communication
20 μs/point Real-time Communication for
Ultra-precision Motion Closed-loop Control
In a motion system achieving speed up to 200 mm/s with nanometer-level precision, the C1-FLT sensor paired with the Faraday.03 monitor provides real-time position information for closed-loop control.
The Faraday.03 performs position updates every 20 ms, offering critical support for PID dynamic control.
The closed-loop system completes five motion phases – startup, acceleration, uniform motion, deceleration, and stop – in 5.3 ms, achieving a smooth 1-nm step without overshoot.