Defined by size
“16mm Series”
“25mm Series”
“35mm Series”
“55mm Series”
Defined by size
1 Work Environment
Default: 1.4 K ~ 400 K; 2 E-7 mbar; 35 Tesla
Option 1 – .ULT, lowest use temperature 10 mK
Option 2 – .UHV, highest vaccum environment 2 E-11 mbar
Default: 1.4 K ~ 400 K; 2 E-7 mbar; 35 Tesla
Option 1 – .ULT, lowest use temperature 10 mK
Option 2 – .UHV, highest vaccum environment 2 E-11 mbar
Work Environment 1
2 Dimensions
16*16*10.5 mm
16*16*16 mm
25*25*9.5 mm
25*25*17 mm
25*25*19.6 mm
25*25*29.6 mm
35*35*10.5 mm
55*55*10.5 mm
55*55*21.2 mm
Dimensions 2
3 Travel Range
3 mm
3 mm
6 mm
6 mm
6 mm
16 mm
20 mm
30 mm
25 mm
Travel Range 3
4 Max.Load
50 g
250 g
500 g
300 g
300 g
300 g
2500 g
2500 g
500 g
Max.Load 4
5 Dynamic Drive Force
1.5 N
3 N
2 N
3 N
3 N
3 N
3 N
3 N
5 N
Dynamic Drive Force 5
6 Encoder
Resistive sensor
Resistive sensor
Encoder 6
Sensor Range
3 mm
3 mm
6 mm
6 mm
6 mm
16 mm
20 mm
30 mm
25 mm
Sensor Range
Sensor Resolution
150 nm
150 nm/p>
Sensor Resolution
Sensor Repeatability
1-2 um
1-2 um
Sensor Repeatability
7 Drive Voltage
Max. 200 V
Max. 200 V
Drive Voltage 7
8 Pins Number
Driven – 2 pins
Sensor – 3 pins
Driven – 2 pins / 4 pins (adv)
Sensor – 3 pins
Driven – 2 pins,
Sensor – 3 pins
Driven – 2 pins / 4pins (adv)
Sensor – 3 pins
Driven – 2 pins / 4 pins (adv)
Sensor – 3 pins
Driven – 3 pins,
Sensor – 3 pins
Driven – 2 pins,
Sensor – 3 pins
Driven – 2 pins / 7 pins (adv)
Sensor – 3 pins
Pins Number 8
9 Weight
10 g
12 g
24 g
28 g
34 g
40 g
38 g
130 g
200 g
Weight 9