MultiFields — Low Temperature·Piezoelectric Motion Stage / Scanner / Scanner55-xy.HV
Scanner55-xy.HV Piezoelectric Scanner
Low Temperature Series, High-Load Scanner Stage
Compact Design, Outer Size: 55 * 55 * 15 mm
UHV & Ultra Low Temperature: 2 E-11 mbar & 10 mK
Non-Magnetic Materials: Pure Ti & BeCu, Max.35 Tesla
High Load: 500 g
Travel Range @ 300 K: 120 * 120 um
Space Scan Resolution 2 nm
· Specification
*In principle, there is no requirement on the total resistance of wiring used to drive a Multifields low temperature piezo-positioner (50 ohm below recommended).
Scanner55-xy.HV
Scanner55-xy.HV.ULT
Scanner55-xy.UHV
Scanner55-xy.UHV.ULT
底座尺寸 (Footprint)
55 mm*55 mm
高度 (Height)
15 mm
重量 (Weight)
150 g
扫描维度 (Scanning Axies)
X, Y
工作环境 (Work Environment)
基础运行环境 (Work Environment)
Temperature range: 1.6 – 400 K; Vacuum degree: 1E-7 mbar; Maximum magnetic field: 35 Tesla
极低温 10 mK – 400K (Option 1)
超高真空 2E-11 mbar (Option 2)
材料 (Materials)
主体 (Mainbody)
纯钛 (Pure Ti)
铍铜 (BeCu)
纯钛 (Pure Ti)
铍铜 (BeCu)
线缆 (Wires)
磷铜双绞线 (Phosphor Bronze Twisted Paired Wire) 20 cm
插针材料 (Pins Materials)
Polyester (Glass Fiber Filled), BeCu
Peek, BeCu
插针数目 (Pins)
4 pins
运动参数 (Motion)
行程@300 K (Travel Range)
120 um*120 um
驱动电压 (Drive Voltage)
Max. 75 V @300 K
Max. 180 V @4 K
最大负载 (Load)
500 g
电容@300 K (Capacitance)
7 uF
空间扫描分辨率 (Resolution)
2 nm
线性度误差 (Linearity Error)
Typical ~ 0.1 %
可重复性 (Repeatability)
< 10 nm
关键尺⼨图 (Schematic)
配件-可选 (Options)
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