Defined by size

“16mm Series”

“25mm Series”

“35mm Series”

“55mm Series”

Defined by size

1 Work Environment

Default: 1.4 K ~ 400 K; 2 E-7 mbar; 18 Tesla
Option 1 – .ULT, lowest use temperature 30 mK
Option 2 – .UHV, highest vaccum environment 2 E-11 mbar

Default: 1.4 K ~ 400 K; 2 E-7 mbar; 18 Tesla
Option 1 – .ULT, lowest use temperature 30 mK
Option 2 – .UHV, highest vaccum environment 2 E-11 mbar

Work Environment 1

2 Dimensions

16*16*10.5 mm

16*16*16 mm

25*25*9.5 mm

25*25*17 mm

25*25*19.6 mm

25*25*29.6 mm

35*35*10.5 mm

55*55*10.5 mm

55*55*21.2 mm

Dimensions 2

3 Travel Range

3 mm

3 mm

6 mm

6 mm

6 mm

16 mm

20 mm

30 mm

25 mm

Travel Range 3

4 Max.Load

50 g

250 g

500 g

300 g

300 g

300 g

2500 g

2500 g

500 g

Max.Load 4

5 Dynamic Drive Force

1.5 N

3 N

2 N

3 N

3 N

3 N

3 N

3 N

5 N

Dynamic Drive Force 5

6 Encoder

Resistive sensor

Resistive sensor

Encoder 6

Sensor Range

3 mm

3 mm

6 mm

6 mm

6 mm

16 mm

20 mm

30 mm

25 mm

Sensor Range

Sensor Resolution

150 nm

150 nm/p>

Sensor Resolution

Sensor Repeatability

1-2 um

1-2 um

Sensor Repeatability

7 Drive Voltage

Max. 200 V

Max. 200 V

Drive Voltage 7

8 Pins Number

Driven – 2 pins
Sensor – 3 pins

Driven – 2 pins / 4 pins (adv)
Sensor – 3 pins

Driven – 2 pins,
Sensor – 3 pins

Driven – 2 pins / 4pins (adv)
Sensor – 3 pins

Driven – 2 pins / 4 pins (adv)
Sensor – 3 pins

Driven – 3 pins,
Sensor – 3 pins

Driven – 2 pins,
Sensor – 3 pins

Driven – 2 pins / 7 pins (adv)
Sensor – 3 pins

Pins Number 8

9 Weight

10 g

12 g

24 g

28 g

34 g

40 g

38 g

130 g

200 g

Weight 9