Intro.      Spec.       DL.


Scanner16-xy.HV Piezoelectric Scanner

Low Temperature Series, Smallest Scanner Stage

 Compact Design, Outer Size: 16 * 16 * 9 mm

 UHV & Ultra Low Temperature: 2 E-11 mbar & 30 mK

 Non-Magnetic Materials: Pure Ti & BeCu, Max.18 Tesla

 High Load: 100 g

 Travel Range @ 300 K: 30 * 30 um

 Space Scan Resolution 0.5 nm

· Specification

*In principle, there is no requirement on the total resistance of wiring used to drive a Multifields low temperature piezo-positioner (50 ohm below recommended).





底座尺寸 (Footprint)

16 mm*16 mm

高度 (Height)

9 mm

重量 (Weight)

8 g

扫描维度 (Scanning Axies)

X, Y

工作环境 (Work Environment)

基础运行环境 (Work Environment)

Temperature range: 1.6 – 400 K; Vacuum degree: 1E-7 mbar; Maximum magnetic field: 18 Tesla

极低温 30 mK – 400K (Option 1)

超高真空 2E-11 mbar (Option 2)

材料 (Materials)

主体 (Mainbody)

纯钛 (Pure Ti)

铍铜 (BeCu)

纯钛 (Pure Ti)

铍铜 (BeCu)

线缆 (Wires)

磷铜双绞线 (Phosphor Bronze Twisted Paired Wire) 20 cm

插针材料 (Pins Materials)

Polyester (Glass Fiber Filled), BeCu

Peek, BeCu

插针数目 (Pins)

4 pins

运动参数 (Motion)

行程@300 K (Travel Range)

30 um*30 um

驱动电压 (Drive Voltage)

Max. 75 V @300 K

Max. 180 V @4 K

最大负载 (Load)

100 g

电容@300 K (Capacitance)

1 uF

空间扫描分辨率 (Resolution)

0.5 nm

线性度误差 (Linearity Error)

Typical ~ 0.1 %

可重复性 (Repeatability)

< 10 nm

关键尺⼨图 (Schematic)

配件-可选 (Options)


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Contact us

Welcome to communicate with us at any time by message, telephone, e-mail or face-to-face!

  • (+86) 186 1027 8097

  • 186 1027 8097


  • Building 2, Nonferrous Metals New Materials Science Park, Huairou Science City, Huairou District, Beijing