MultiFields — Piezoelectric Motion Stage·Room Temperature / Carrier.OB.Series

CN

Objective Type · Scanner(Closed-loop)

Carrier.OB Series

Balanced Selection, Standard Series

Capacitance (.C) Position Sensor; Maximum Resolution 0.2 nm; Ultra-high Vacuum (.UHV) Option Upgrade

Z-direction Motion

Z-direction Motion

Carrier.OB50.C

50 um Z-direction Travel, High-speed Response

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Size · 63.5 mm × 46 mm × 26 mm

Travel Range · 50 um

Carrier.OB100.C

100 um Z-direction Travel, Stable Within 15 ms

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Size · 63.5 mm × 46 mm × 26 mm

Travel Range · 100 um

Z-direction Motion

Carrier.OBHL100.C

2 kg Ultra-strong Load, Stable Within 10 ms

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Size · 68 mm × 68 mm × 19 mm

Travel Range · 100 um