MultiFields — Piezoelectric Motion Stage·Room Temperature / S, SD & SH Series

CN

Compact · Scanner (Closed-loop)

S Series

Balanced Selection, Standard Series

Capacitance (.C) Position Sensor; Maximum Resolution 0.2 nm; Ultra-high Vacuum (.UHV) Option Upgrade

X-direction Motion

Z-direction Motion

S300.x.C

Horizontal Motion In X-direction, 300 um Long Range Motion

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Size · 55 mm × 55 mm × 18 mm

Travel Range · 300 um

S100.z.C

Vertical Motion In Z-direction, Ultra-thin And Highly Collimated Design

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Size · 55 mm × 55 mm × 18 mm

Travel Range · 100 um

X Y Direction Motion        X Y Z Direction Motion

S100.xy.C

S100.xyz.C

Simultaneous Multi-dimensional Motion, 0.3 nm Spatial Resolution

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Size · 55 mm × 55 mm × 20 mm

Travel Range · 100 um

Compact · Scanner (Closed-loop)

SD Series

High-speed Response, Dynamic Series

Ultra-fast Response And Stronger Rigidity Design; Ultra-stable Design With 0.1 nm Spatial Resolution; Supports Upgrade Of Ultra-high Vacuum (.UHV) Options

X-direction Motion

SD15.x.C

3.30 kHz Resonance Frequency, Excellent Rigidity Design;

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Size · 62 mm × 40 mm × 13.5 mm

Travel Range · 15 um

SD30.x.C

2.2 kHz Resonance Frequency, Longer Range

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Size · 65 mm × 65 mm × 18 mm

Travel Range · 30 um

Compact · Scanner (Closed-loop)

SH Series

High-load Version, High-Load Series

Capacitance (.C) Position Sensor; Maximum Resolution 0.2 nm; Ultra-high Vacuum (.UHV) Option Upgrade

X Y Z Direction Motion

SH30.xyz.C

10 kg Ultra-strong Load, 3-dimensional Free Motion

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Size · 160 mm × 160 mm × 35 mm

Travel Range · 30 um × 30 um × 15 um