MultiFields — Piezoelectric Motion Stage·Room Temperature / Carrier/ Carrier.HS100.xy.C

Intro.      Spec.       DL.    CN

Scanning Motion · High-load Through-Hole Carrier.HS100.xy.C

➡ High-load · High-speed XY Plane Motion，Large Through-hole Design，Parallel Design + Capacitance Closed-loop Sensor

           Carrier.HS100.xy.Ｃ

• 2-dimensional XY Scan Motion 100 um；

• Closed-loop Resolution Better Than 1 nm;

• Maximum Load 3.5 kg;

• For Optical Microscopy – Super-resolution Customized Solution;

• Support For Non-magnetic (.NM) And High-vacuum (.UHV) Option Upgrades;

Optional Version ⇨

Carrrier.-HS100.xy.C

Basic Information

Motion Direction 运动方向

X, Y, Direction

Size 底面尺寸*高度

150 mm × 150 mm × 40 mm

Main Material 主体材料

Aluminum Alloy / Stainless Steel

Travel Range 运动行程

100 um × 100 um

Upgrade options 升级选项

Optional Extensions: Nm, Absolutely Non-magnetic Version; UHV, Ultra-high Vacuum Version

Hollow Through Hole  中空透孔

66 mm × 66 mm

Motion & Position

线性度误差（z方向运动）

0.035%

Motion Resolution 运动分辨率

1nm / 0.2nm

Repeatability 运动可重复精度

± 10 nm

Rigidity 刚性

2 N/ um

Resonance Frequency 共振频率（空载/2.5 kg）

420 Hz/ 130 Hz

Max. Load 最大负载

3.5 kg

Encoder Type 闭环传感器（闭环版本）

Capacitive Type

Max Operating Voltage 驱动电压

150 V

Other Information

Recommended Operation Temperature 推荐使用温度

15 ~ 40 °C

Weight 重量

1 kg

Drawings 尺寸图