Carrier.HS100.z-EN

MultiFields — Piezoelectric Motion Stage·Room Temperature / Carrier/ Carrier.HS100.z.C

Intro. Spec. DL. CN

Scanning Motion · High-load Through-Hole Carrier.HS100.z.C

➡ High-load · High-speed Z-axis Motion，Large Through-hole Design，Parallel Design + Capacitance Closed-loop Sensor

Carrier.HS100.z.C

• Z Scan Motion 100 um;

• Closed-loop Resolution Better Than 1 nm;

• Maximum Load 3 kg;

• For Optical Microscopy – Super-resolution Customized Solution;

• Support For Non-magnetic (.NM) And High-vacuum (.UHV) Option Upgrades;

Optional Version ⇨

Carrier.HS100.z.C

Basic Information

Motion Direction 运动方向

Z Direction

Size 底面尺寸*高度

150 mm × 150 mm × 30 mm

Main Material 主体材料

Aluminum Alloy / Stainless Steel

Travel Range 运动行程

100 um

Upgrade options 升级选项

Optional Extensions: Nm, Absolutely Non-magnetic Version; UHV, Ultra-high Vacuum Version

Hollow Through Hole 中空透孔

66 mm × 66 mm

Motion & Position

线性度误差（z方向运动）

0.035%

俯仰/偏摆/旋转

50 urad / 50 urad / 10 urad

Motion Resolution 运动分辨率（闭环/开环）

1 nm / 0.3 nm

Repeatability 运动可重复精度

± 10 nm

Rigidity 刚性

2.5 N/ um

Resonance Frequency 共振频率（空载/2.5 kg）

500 Hz/ 200 Hz

Max. Load 最大负载

5 kg

Encoder Type 闭环传感器（闭环版本）

Capacitive Type

Max Operating Voltage 驱动电压

Max. 150 V

Other Information

Recommended Operation Temperature 推荐使用温度

15 ~ 40 °C

Weight 重量

1 kg

Drawings 尺寸图

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