MultiFields — Piezoelectric Motion Stage·Room Temperature / Carrier/ Carrier.HS100.z.C
Scanning Motion · High-load Through-Hole Carrier.HS100.z.C
➡ High-load · High-speed Z-axis Motion,Large Through-hole Design,Parallel Design + Capacitance Closed-loop Sensor
Optional Version ⇨
Carrier.HS100.z.C
Basic Information
Motion Direction 运动方向
Z Direction
Size 底面尺寸*高度
150 mm × 150 mm × 30 mm
Main Material 主体材料
Aluminum Alloy / Stainless Steel
Travel Range 运动行程
100 um
Upgrade options 升级选项
Optional Extensions: Nm, Absolutely Non-magnetic Version; UHV, Ultra-high Vacuum Version
Hollow Through Hole 中空透孔
66 mm × 66 mm
Motion & Position
线性度误差(z方向运动)
0.035%
俯仰/偏摆/旋转
50 urad / 50 urad / 10 urad
Motion Resolution 运动分辨率(闭环/开环)
1 nm / 0.3 nm
Repeatability 运动可重复精度
± 10 nm
Rigidity 刚性
2.5 N/ um
Resonance Frequency 共振频率(空载/2.5 kg)
500 Hz/ 200 Hz
Max. Load 最大负载
5 kg
Encoder Type 闭环传感器(闭环版本)
Capacitive Type
Max Operating Voltage 驱动电压
Max. 150 V
Other Information
Recommended Operation Temperature 推荐使用温度
15 ~ 40 °C
Weight 重量
1 kg
Drawings 尺寸图