MultiFields — Piezoelectric Motion Stage·Room Temperature / Carrier / Carrier.HS100.zTxTy.C

Intro.      Spec.       DL.    CN

High-load through-hole · Scanning Motion Carrier.HS100.zTxTy.C

➡ For Z-direction Scanning Motion, Two Axis Swing Adjustment Ensures True Alignment

Carrier.HS100.zTxTy.C

• 3-dimension Z, θxy Scanning Motion;

• 100 um Travel Range, 1 mrad & 1 mrad；

• Closed-loop Resolution Better Than 1 nm;

• For Optical Microscopy – Super-resolution Customized Solution;

• Maximum Load 2.5 kg;

• Support For Non-magnetic (.NM) And High-vacuum (.UHV) Option Upgrades;

Optional Version ⇨

Carrier.HS100.zTxTy.C

Basic Information

Motion Direction 运动方向

Z，θx & θy

Size 底面尺寸*高度

150 mm × 150 mm × 30 mm

Main Material 主体材料

Aluminum Alloy / Stainless Steel

Travel Range 运动行程（Z，θx & θy ）

100 um，1 mrad & 1mrad

Upgrade options 升级选项

Optional Extensions: Nm, Absolutely Non-magnetic Version; UHV, Ultra-high Vacuum Version

Hollow Through Hole中空透孔

66 mm × 66 mm

Motion & Position

Z线性度误差

0.035%

θ线性度误差

0.15%

Z Motion Resolution Z 运动分辨率（闭环/开环）

1 nm / 0.5 nm

ΘMotion Resolution θ运动分辨率（闭环/开环）

0.05 urad / 0.04 urad

Repeatability 运动可重复精度 (Z & θ)

±10 nm, ±0.1urad

Rigidity 刚性

2 N/ um

Z Resonance Frequency Z共振频率（空载/2.5 kg）

480 Hz/ 160 Hz

Θ Resonance Frequency θ共振频率（空载/2.5 kg）

500 Hz/ 150 Hz

Max. Load最大负载

2.5 kg

Encoder Type 闭环传感器

Capacitive Type

Max Operating Voltage 驱动电压

Max. 150 V

Other Information

Recommended Operation Temperature 推荐使用温度

15 ~ 40 °C

Weight 重量

1 kg

Install 安装

Threaded Hole Automatically Compatible With Carrier.L7550.XY

Drawings 尺寸图