MultiFields — Piezoelectric Motion Stage·Room Temperature / Lxxx.indus
.indus Series—Motion Module For Minimalist Industrial Style
Multi Degree Of Freedom · Nanoscale Motion Can Also Be Built On Building Blocks
Optional Version ⇨
L060.indus
L100.indus
L180.indus
.NM, Absolute Non-magnetic Version;
.UHV, Ultra-high Vacuum Version;
Size 产品尺寸
105 mm x 24 mm x 16.5mm
180 mm x 24 mm x 17 mm
300 mm x 36 mm x 18 mm
Main Material 主体材料
Stainless Steel / Aluminum Alloy
Cables & Connectors
线缆 & 接头
Standard Shielded Cable D-Sub 15
Motion Parameters – Space Recommended Installation Form I. (The following properties were measured under the recommended installation form)
Travel Range 运动行程
60 mm
100 mm
180 mm
Max. Speed 最大速度
~ 20 mm/s
Step Size 最小步伐
~ 5 nm
Step Frequency 驱动频率
Max. 20 kHz (Ultra-quiet Motion)
Dynamic Force 最大水平推力
3 N
Holding Force 保持力
5 N
Pitch / Yaw Over Travel Range
全行程俯仰/偏摆
0.3 mrad
Motion Parameters – Space Recommended Installation Form II. (The following properties were measured under the recommended installation form)
Max. Load 最大垂直负载
2 N
Holding Force 保持力
5 N
Sensor
Encoder Type 位置传感类型
– Optic Encoder (.O)
Encoder Range 位置传感行程
60 mm
100 mm
180 mm
Encoder Resolution 位置传感分辨率
– Optic Encoder (.O) 1 nm (other option see Datasheet)