S100.xy.C-EN

MultiFields — Piezoelectric Motion Stage·Room Temperature / S, SD & SH Series / S100.Lab.XY/XYZ

Piezoelectricity · 2D/3D Ccanning Motion S100.Lab.XY / XYZ

➡ Customized Solutions For “3 Degree Of Freedom Scanning Motion” Requirements Such As Precision Optics And Semiconductor Characterization

S100.Lab.XY / XYZ

• 2D XY Scanning Motion 100 um × 100 um;

• 3D XYZ Scanning Motion 100 um × 100 um × 100 um;

• Size, 55 mm × 55 mm × 40 mm;

• Closed-loop Resolution Better Than 1 nm;

• Maximum Load 500 g;

• Supports Non-magnetic (.NM) And Ultra-high Vacuum (.UHV) Options;

Optional Version ⇨

S100.XY/XYZ.C

Basic Information

Motion Direction 运动方向

S100.Lab.XY: X, Y, Direction

S100.Lab.XYZ: X, Y, Z Direction

Size 底面尺寸*高度

55 mm × 55 mm × 40 mm

Main Material 主体材料

Aluminum Alloy / Stainless Steel

Travel Range 运动行程

S100.XY.C: 100 um × 100 um

S100.XYZ.C: 100 um × 100 um × 100 um

Upgrade options 升级选项

Optional Extensions: Nm, Absolutely Non-magnetic Version; UHV, Ultra-high Vacuum Version

Motion & Position

Motion Resolution 运动分辨率

0.2 nm(Open-loop) 1nm(Closed-loop)

Linear Error 线性误差

0.1%

Resonance Frequency 共振频率

S100.XY.C: 400 Hz，350 Hz

S100.XYZ.C: 300 Hz

Rigidity 刚性

0.5 N/um

S100.XYZ.C: 300 Hz

Encoder Type 闭环传感器（闭环版本）

Capacitive Type

Max Operating Voltage 驱动电压

150 V

Other Information

Recommended Operation Temperature 推荐使用温度

-20 ~ 80 °C

Weight 重量

500 g

Cable Length 线缆长度

1 m / D-Sub 3W3

Drawings 尺寸图

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