S100.xy.C-EN

Piezoelectricity · 2D/3D Ccanning Motion S100.Lab.XY / XYZ

➡ Customized Solutions For “3 Degree Of Freedom Scanning Motion” Requirements Such As Precision Optics And Semiconductor Characterization

S100.Lab.XY / XYZ

• 2D XY Scanning Motion 100 um × 100 um;

• 3D XYZ Scanning Motion 100 um × 100 um × 100 um;

• Size, 55 mm × 55 mm × 40 mm;

• Closed-loop Resolution Better Than 1 nm;

• Maximum Load 500 g;

• Supports Non-magnetic (.NM) And Ultra-high Vacuum (.UHV) Options;

Optional Version ⇨

S100.XY/XYZ.C

Basic Information

Motion Direction

S100.Lab.XY: X, Y, Direction

S100.Lab.XYZ: X, Y, Z Direction

Size

55 mm × 55 mm × 40 mm

Main Material

Aluminum Alloy / Stainless Steel

Travel Range

S100.XY.C: 100 um × 100 um

S100.XYZ.C: 100 um × 100 um × 100 um

Upgrade Options

Optional Extensions: Nm, Absolutely Non-magnetic Version; UHV, Ultra-high Vacuum Version

Motion & Position

Motion Resolution

0.2 nm(Open-loop) 1 nm(Closed-loop)

Linear Error

0.1%

Resonance Frequency

S100.XY.C: 400 Hz，350 Hz

S100.XYZ.C: 300 Hz

Rigidity

0.5 N/um

S100.XYZ.C: 300 Hz

Encoder Type

Capacitive Type

Max Operating Voltage

150 V

Other Information

Recommended Operation Temperature

-20 ~ 80 °C

Weight

500 g

Cable Length

1 m / D-Sub 3W3

Drawings