MultiFields — Piezoelectric Motion Stage·Room Temperature / S, SD & SH Series / S100.Lab.XY/XYZ
Piezoelectricity · 2D/3D Ccanning Motion S100.Lab.XY / XYZ
➡ Customized Solutions For “3 Degree Of Freedom Scanning Motion” Requirements Such As Precision Optics And Semiconductor Characterization
Optional Version ⇨
S100.XY/XYZ.C
Basic Information
Motion Direction 运动方向
S100.Lab.XY: X, Y, Direction
S100.Lab.XYZ: X, Y, Z Direction
Size 底面尺寸*高度
55 mm × 55 mm × 40 mm
Main Material 主体材料
Aluminum Alloy / Stainless Steel
Travel Range 运动行程
S100.XY.C: 100 um × 100 um
S100.XYZ.C: 100 um × 100 um × 100 um
Upgrade options 升级选项
Optional Extensions: Nm, Absolutely Non-magnetic Version; UHV, Ultra-high Vacuum Version
Motion & Position
Motion Resolution 运动分辨率
0.2 nm(Open-loop) 1nm(Closed-loop)
Linear Error 线性误差
0.1%
Resonance Frequency 共振频率
S100.XY.C: 400 Hz,350 Hz
S100.XYZ.C: 300 Hz
Rigidity 刚性
0.5 N/um
S100.XYZ.C: 300 Hz
Encoder Type 闭环传感器(闭环版本)
Capacitive Type
Max Operating Voltage 驱动电压
150 V
Other Information
Recommended Operation Temperature 推荐使用温度
-20 ~ 80 °C
Weight 重量
500 g
Cable Length 线缆长度
1 m / D-Sub 3W3
Drawings 尺寸图