S100.z.C-EN

Piezoelectricity · Single Dimensional Scanning Motion S100.Z.C

➡ Compact Single-axis Z-direction Motion, Capacitor Position Closed-loop Control

S100.z.C

• Z-direction Travel Range 100 um;

• Size, 40 mm x 40 mm x 18 mm;

• Closed-loop Resolution Better Than 1 nm (Open-loop Version Available);

• Maximum Load 500 g;

• Supports Non-magnetic (.NM) And Ultra-high Vacuum (.UHV) Options;

Optional Version ⇨

S100.z.C

Basic Information

Motion Direction 运动方向

Z Direction

Size 产品尺寸

40 × 40 mm × 18 mm

Main Material 主体材料

Normal Version, Stainless Steel
.NM, Aluminum Alloy, Stainless Steel
.UHV, Aluminum Alloy, Pure Titanium

Travel range 运动行程

100 um (Closed-loop)

Cables & Connectors 线缆 & 接头

1 m/D-sub 3W3

Motion & Position

Motion Resolution 运动分辨率

0.2 nm

Pitch/Yaw 摇摆/俯仰

± 25 urad

Linear Error 线性误差

0.02%

Resonance Frequency 共振频率

500 Hz

Rigidity 刚性

0.5 N/um

Max. Load 最大负载

500 g

Encoder Type 闭环传感器闭环传感器（闭环版本）

Capacitive Type

Piezo Capacity (Z) 压电电容 (Z)

150 V

Other Information

Recommended Operation Temperature 推荐使用温度

-20 ~ 80 °C

Weight 重量

150g

Drawings 尺寸图

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