S100.z.C-EN

Piezoelectricity · Single Dimensional Scanning Motion S100.Z.C

➡ Compact Single-axis Z-direction Motion, Capacitor Position Closed-loop Control

S100.z.C

• Z-direction Travel Range 100 um;

• Size, 40 mm x 40 mm x 18 mm;

• Closed-loop Resolution Better Than 1 nm (Open-loop Version Available);

• Maximum Load 500 g;

• Supports Non-magnetic (.NM) And Ultra-high Vacuum (.UHV) Options;

Optional Version ⇨

S100.z.C

Basic Information

Motion Direction

Z Direction

Size

40 × 40 mm × 18 mm

Main Material

Normal Version, Stainless Steel
.NM, Aluminum Alloy, Stainless Steel
.UHV, Aluminum Alloy, Pure Titanium

Travel Range

100 um (Closed-loop)

Cables & Connectors

1 m/D-sub 3W3

Motion & Position

Motion Resolution

0.2 nm

Pitch/Yaw

± 25 urad

Linear Error

0.02%

Resonance Frequency

500 Hz

Rigidity

0.5 N/um

Max. Load

500 g

Encoder Type

Capacitive Type

Piezo Capacity (Z)

150 V

Other Information

Recommended Operation Temperature

-20 ~ 80 °C

Weight

150g

Drawings