MultiFields — Piezoelectric Motion Stage·Room Temperature / Carrier / Carrier·S200·XY/XYZ

Intro.      Spec.       DL.    CN

Piezoelectric Stage · High-load Carrier.S200.XY / XYZ

➡ Customized Solution For “Large-range, High-precision, High-load” Requirements Of The Loading Platform

• 2-dimensional XY Scan Motion 200 um × 200 um；

• 3-dimensional XYZ Scan Motion 200 um × 200 um × 200 um；

• Closed-loop Resolution Better Than 1 nm;

• Maximum Load 500 g

• For Optical Microscopy – Super-resolution Customized Solution;

• Support For Non-magnetic (. NM) And High-vacuum (. UHV) Option Upgrades;

Carrier·S200·XY / XYZ

Notes

Basic Information

Motion Direction 运动方向

Carrier.S200.XYZ: X, Y, Direction

Carrier.S200.XYZ: X, Y, Z Direction

Size 底面尺寸*高度

182 mm × 150 mm × 15 mm

Main Material 主体材料

Aluminum Alloy / Stainless Steel

Travel Range 运动行程

Carrier.S200.XY: 200 um × 200 um

Carrier.S200.XYZ: 200 um × 200 um × 200 um

Upgrade options 升级选项

Optional Extensions: Nm, Absolutely Non-magnetic Version; UHV, Ultra-high Vacuum Version

Hollow Through Hole 中空透孔

77 mm × 65 mm

Motion & Position

Motion Resolution 运动分辨率

2 nm

Repeatability 运动可重复精度

± 20 nm

Linear Error 线性误差

Better Than 0.1%

Resonance Frequency 共振频率

200Hz(X) 150Hz(Y)

Max. Load 最大负载

500 g

Encoder Type 闭环传感器（闭环版本）

Capacitive Type

Max Operating Voltage 驱动电压

Capacitive Type

Max Operating Voltage 驱动电压

Max. 150 V

Other Information

Recommended Operation Temperature 推荐使用温度

-15 ~ 40 °C

Weight 重量

1kg

Install 安装

Threaded Hole Automatically Compatible With Carrier.L7550.XY

Drawings 尺寸图