Intro.      Spec.       DL.    CN

Piezoelectricity · Single Dimensional Scanning Motion S300.x.C

Standard Single-axis Scanning Motion Module, Supporting Closed-loop Control Of Capacitance And Resistance


• X-direction Travel Range 300 um;

• Size, 50 mm x 50 mm x 17 mm;

• Closed-loop Resolution Better Than 0.4 nm (Open-loop Version Available);

• Maximum Load 500 g;

• Supports Non-magnetic (.NM) And Ultra-high Vacuum (.UHV) Options;

Optional Version ⇨


Basic Information

Motion Direction 运动方向

X Direction

Upgrade options 升级选项

Optional Extensions: Nm, Absolutely Non-magnetic Version; UHV, Ultra-high Vacuum Version

Size 底面尺寸*高度

50 mm × 50 mm × 17 mm

Main Material 主体材料

Aluminum Alloy & Stainless Steel

Travel range 运动行程

300 um(Open-loop) 
250 um(Closed-loop)

Motion & Position

Motion Resolution 运动分辨率(开环)

3 nm

Linear Error 线性误差


Resonance Frequency共振频率

350 Hz

Max. Load 最大负载

500 g

Encoder Type 闭环传感器(闭环版本)

Capacitive Type

位置精度 Resolution

1.5 nm

Max Operating Voltage 驱动电压

Max.150 V

Other Information

Recommended Operation Temperature 推荐使用温度

-20 ~ 80 °C

Weight 重量

200 g

Cable Length 线缆长度

1m / D-Sub 3W3

Drawings 尺寸图