S300.x.C-EN

Piezoelectricity · Single Dimensional Scanning Motion S300.x.C

➡ Standard Single-axis Scanning Motion Module, Supporting Closed-loop Control Of Capacitance And Resistance

S300.x.C

• X-direction Travel Range 300 um;

• Size, 50 mm x 50 mm x 17 mm;

• Closed-loop Resolution Better Than 0.4 nm (Open-loop Version Available);

• Maximum Load 500 g;

• Supports Non-magnetic (.NM) And Ultra-high Vacuum (.UHV) Options;

Optional Version ⇨

S300.x.C

Basic Information

Motion Direction 运动方向

X Direction

Upgrade options 升级选项

Optional Extensions: Nm, Absolutely Non-magnetic Version; UHV, Ultra-high Vacuum Version

Size 底面尺寸*高度

50 mm × 50 mm × 17 mm

Main Material 主体材料

Aluminum Alloy & Stainless Steel

Travel range 运动行程

300 um(Open-loop)  250 um(Closed-loop)

Motion & Position

Motion Resolution 运动分辨率（开环）

3 nm

Linear Error 线性误差

0.1%

Resonance Frequency共振频率

350 Hz

Max. Load 最大负载

500 g

Encoder Type 闭环传感器（闭环版本）

Capacitive Type

位置精度 Resolution

1.5 nm

Max Operating Voltage 驱动电压

Max.150 V

Other Information

Recommended Operation Temperature 推荐使用温度

-20 ~ 80 °C

Weight 重量

200 g

Cable Length 线缆长度

1m / D-Sub 3W3

Drawings 尺寸图

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