SD15.x.C-EN

MultiFields — Piezoelectric Motion Stage·Room Temperature / S, SD & SH Series / SD15/30.x.C

Intro. Spec. DL. CN

Piezoelectricity · High-speed Single Dimensional Scanning Motion SD15/30.x.C

➡ Standard Single-axis Scanning Motion Module, Supporting Closed-loop Control Of Capacitance

SD15.x.C

SD30.x.C

• X-direction Travel Range 15 um, 30 um;

• Size 62 mm x 40 mm x 13.5 mm,

80 mm x 40 mm x 13.5 mm；

• Closed-loop Resolution Better Than 0.1 nm;

• Capacitive Position Sensor;

• High-speed Motion Response;

• Upgrade Options: HV, High Vacuum Version; UHV, Ultra-high Vacuum Version;

Optional Version ⇨

S15.x.C

S30.x.C

Basic Information

Motion Direction

X Direction

Size

62 mm × 40 mm× 13.5 mm

80 mm × 40 mm× 13.5 mm

Main Material

Aluminum Alloy

Travel Range

15 um (Closed-loop)

30 um (Closed-loop)

Upgrade Options

Expansion Options: HV, High Vacuum Version; UHV, Ultra-high Vacuum Version;

Motion & Position

Motion Resolution

0.1nm

0.2 nm

Repeatability

2 nm

4 nm

Linear Error

0.035%

Pitch

2 urad

Yaw

2 urad

Resonance Frequency

3.3 kHz

Resonance Frequency (300g Load)

1 kHz

0.625 kHz

Rigidity

28 N/um

18 N/um

Encoder Type

Capacitive Type

Other Information

Recommended Operation Temperature

-20 ~ 80 °C

Weight

250 g

350 g

Cable Length

1 m / D-sub 3W3

Controller

Archimedes Series Controller

Drawings