MultiFields — Piezoelectric Motion Stage·Room Temperature / S, SD & SH Series / SD15/30.x.C
Piezoelectricity · High-speed Single Dimensional Scanning Motion SD15/30.x.C
➡ Standard Single-axis Scanning Motion Module, Supporting Closed-loop Control Of Capacitance And Resistance
Optional Version ⇨
S15.x.C
S30.x.C
Basic Information
Motion Direction 运动方向
X Direction
Size 底面尺寸*高度
62 mm × 40 mm× 13.5 mm
80 mm × 40 mm× 13.5 mm
Main Material 主体材料
Aluminum Alloy
Travel Range 运动行程
15 um (Closed-loop)
30 um (Closed-loop)
Upgrade Options 升级选项
Expansion Options: HV, High Vacuum Version; UHV, Ultra-high Vacuum Version;
Motion & Position
Motion Resolution 运动分辨率
0.1nm
0.2 nm
Repeatability 运动可重复精度
2 nm
4 nm
Linear Error 线性误差
0.035%
Pitch 摇摆
2 urad
Yaw 俯仰
2 urad
Resonance Frequency 共振频率
3.3 kHz
3.3 kHz
Resonance Frequency 共振频率 (300g 负载)
1 kHz
0.625 kHz
Rigidity 刚性
28 N/um
18 N/um
Encoder Type 闭环传感器(闭环版本)
Capacitive Type
Other Information
Recommended Operation Temperature 推荐使用温度
-20 ~ 80 °C
Weight 重量
250 g
350 g
Cable Length 线缆长度
1 m / D-sub 3W3
Controller
Archimedes Series Controller
Drawings 尺寸图