SD15.x.C-EN

MultiFields — Piezoelectric Motion Stage·Room Temperature / S, SD & SH Series / SD15/30.x.C

Intro. Spec. DL. CN

Piezoelectricity · High-speed Single Dimensional Scanning Motion SD15/30.x.C

➡ Standard Single-axis Scanning Motion Module, Supporting Closed-loop Control Of Capacitance And Resistance

SD15.x.C

SD30.x.C

• X-direction Travel Range 15 um, 30 um;

• Size 62 mm x 40 mm x 13.5 mm,

80 mm x 40 mm x 13.5 mm；

• Closed-loop Resolution Better Than 0.1 nm;

• Capacitive Position Sensor;

• High-speed Motion Response;

• Upgrade Options: HV, High Vacuum Version; UHV, Ultra-high Vacuum Version;

Optional Version ⇨

S15.x.C

S30.x.C

Basic Information

Motion Direction 运动方向

X Direction

Size 底面尺寸*高度

62 mm × 40 mm× 13.5 mm

80 mm × 40 mm× 13.5 mm

Main Material 主体材料

Aluminum Alloy

Travel Range 运动行程

15 um (Closed-loop)

30 um (Closed-loop)

Upgrade Options 升级选项

Expansion Options: HV, High Vacuum Version; UHV, Ultra-high Vacuum Version;

Motion & Position

Motion Resolution 运动分辨率

0.1nm

0.2 nm

Repeatability 运动可重复精度

2 nm

4 nm

Linear Error 线性误差

0.035%

Pitch 摇摆

2 urad

Yaw 俯仰

2 urad

Resonance Frequency 共振频率

3.3 kHz

Resonance Frequency 共振频率 (300g 负载)

1 kHz

0.625 kHz

Rigidity 刚性

28 N/um

18 N/um

Encoder Type 闭环传感器（闭环版本）

Capacitive Type

Other Information

Recommended Operation Temperature 推荐使用温度

-20 ~ 80 °C

Weight 重量

250 g

350 g

Cable Length 线缆长度

1 m / D-sub 3W3

Controller

Archimedes Series Controller

Drawings 尺寸图

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