MultiFields — Piezoelectric Motion Stage·Room Temperature / S, SD & SH Series / SH30.xyz.C
Piezoelectricity · 3-Dimensional Scanning Motion SH30.xyz.C
➡ Standard Single-axis Scanning Motion Module, Supporting Closed-loop Control Of Capacitance And Resistance
Optional Version ⇨
SH30.xyz.C
Basic Information
Motion Direction 运动方向
X, Y, Z Direciton
Size 底面尺寸*高度
160 mm × 160 mm × 35 mm
Main Material 主体材料
Stainless Steel
Travel Range 运动行程
30 um × 30 um × 15 um
Upgrade Options 升级选项
Optional Extensions: Nm, Absolutely Non-magnetic Version; UHV, Ultra-high Vacuum Version
Motion & Position
Motion Resolution 运动分辨率
0.1 nm(Closed-loop) 0.3 nm(Closed-loop)
Repeatability 运动可重复精度(闭环)
< 3 nm
Yaw Angle 偏摆角度
20 urad / 20 urad / 50 urad
Resonance Frequency共振频率 (空载)
500 Hz
Max. Load 最大负载
10 kg
Encoder Type 闭环传感器(闭环版本)
Capacitive Type
Max Operating Voltage 驱动电压
150 V
Other Information
Recommended Operation Temperature 推荐使用温度
-20 ~ 80 °C
Weight 重量
3 kg
Cable Length 线缆长度
1 m / D-sub 3W3
Drawings 尺寸图