SH30.xyz.C-EN

Piezoelectricity · 3-Dimensional Scanning Motion SH30.xyz.C

➡ Standard Single-axis Scanning Motion Module, Supporting Closed-loop Control Of Capacitance And Resistance

SH30.xyz.C

• 3D XYZ Travel Range 30 um x 30 um x 15 um;

• Size, 160 mm x 160 mm x 35 mm;

• Closed-loop Resolution Better Than 0.3 nm;

• Maximum Load 10 kg;

• Supports Non-magnetic (.NM) And Ultra-high Vacuum (.UHV) Options;

Optional Version ⇨

SH30.xyz.C

Basic Information

Motion Direction 运动方向

X, Y, Z Direciton

Size 底面尺寸*高度

160 mm × 160 mm × 35 mm

Main Material 主体材料

Stainless Steel

Travel Range 运动行程

30 um × 30 um × 15 um

Upgrade Options 升级选项

Optional Extensions: Nm, Absolutely Non-magnetic Version; UHV, Ultra-high Vacuum Version

Motion & Position

Motion Resolution 运动分辨率

0.1 nm(Closed-loop) 0.3 nm(Closed-loop)

Repeatability 运动可重复精度（闭环）

< 3 nm

Yaw Angle 偏摆角度

20 urad / 20 urad / 50 urad

Resonance Frequency共振频率 (空载)

500 Hz

Max. Load 最大负载

10 kg

Encoder Type 闭环传感器（闭环版本）

Capacitive Type

Max Operating Voltage 驱动电压

150 V

Other Information

Recommended Operation Temperature 推荐使用温度

-20 ~ 80 °C

Weight 重量

3 kg

Cable Length 线缆长度

1 m / D-sub 3W3

Drawings 尺寸图

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