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Piezoelectricity · 2D/3D Scanning Motion Carrier.R200

Customized Solutions For “3 Degree Of Freedom Scanning Motion” Requirements Such As Precision Optics And Semiconductor Characterization

• Ultra-quiet Motion, Driven Frequency 20 kHz;

• Extremely Compact Exterior Design, Divided Into 35 mm and 65 mm Categories;

• Closed-loop Control · Position Sensing Supports Resistance Type (.R) And Optical Type (.O);

• High Precision · Spatial Sensing Resolution (.O) 0.75 urad

• Economical · Spatial Sensing Resolution (. R) 1 mrad;

• Minimum Step Size Less Than 10 nm;

• Multiple Axis Stacked Installation Adapters Available;

• Controller Compatible With Linear, Rotator And Goniometer;

• Supports Non-magnetic (.NM) And Ultra-high Vacuum (.UHV) Options;

Optional Version ⇨


Basic Information

Motion Direction 运动方向

Z-axis Rotation

Size 底面尺寸*高度

200mm × 200 mm × 24 mm

Main Material 主体材料

Aluminum Alloy

Travel Range 运动行程


Upgrade options 升级选项

Expansion Options: UHV, Ultra-high Vacuum Version

Hollow Through Hole 中空透孔

φ 190 / φ 60 mm

Motion & Position

Motion Type

Continuous Motion

Encoder Resolution

1 urad

Driven Frequency

Max. 20 kHz

Self Lock Torque

20 N*mm

Dirving Torque

15 N*mm

Repeatability 运动可重复精度

300 µ° / 6 urad

Max. Load 最大负载

1 kg

Max Operating Voltage 驱动电压

Max. 120V

Other Information

Recommended Operation Temperature 推荐使用温度

15 ~ 40 °C

Weight 重量

2 kg

Install 安装

Threaded Hole Automatically Compatible With Carrier.L7550

Drawings 尺寸图