CN

Motion · Closed-loop · Lab Series

Linear · Closed-loop
LSxx.Lab.X

• There Are Three External Dimensions To Choose From: 35mm & 65mm

• Optical Encoder Position Sensor (.O) Are Optional

• Support For Non-magnetic (.NM) And Ultra-high Vacuum (.UHV) Option Upgrades

• Controller Compatible With Rotator, Goniometer

Rotator · Closed-loop
RSxx.Lab.X

• There Are Three External Dimensions To Choose From: 35mm & 65mm

• Optical Encoder Position Sensor (.O) Are Optional

• Support For Non-magnetic (.NM) And Ultra-high Vacuum (.UHV) Option Upgrades

• Controller Compatible With Linear, Goniometer

Goniometer · Closed-loop
GS65.Lab.X

• 65mm Standard Size

• Optical Encoder Position Sensor (.O) Are Optional

• Support For Non-magnetic (.NM) And Ultra-high Vacuum (.UHV) Option Upgrades

• Controller Compatible With Linear, Rotator

Motion Stage · Closed-loop · Indus Series

Linear · Closed-loop
LSXXX.Indus

• 30, 60, 100, 120, 150 & 180 mm Travel Range Are Optional

• Nano-scale Position Sensor(.O), 1 nm / 10 nm Optional

• High Load, Support For Multiple Splicing Cases

• Supports Ultra-high Vacuum (.UHV) Option Upgrades

• Controller Compatible With Lab Series Linear, Rotator & Goniometer

Scanner · Closed-loop

Compact · Scanner (Closed-loop)
S , SD & SH Series

• Extremely Compact Exterior Design; X, Z, XY & XYZ Motion Directions Are Covered

• The Motion Range Covers 100um To 300um (Larger Range Can Be Customized)

Brand New Design Guarantees High Operating Frequency And Extremely Fast Response

Capacitance (.C) & Resistance (.R) Position Sensor

Resolution Up To 0.2 nm

Support For Non-magnetic (.NM) And Ultra-high Vacuum (.UHV) Option Upgrades

Objective Lens · Scanner (Closed-loop)
Carrier.OB.Series

Z-axis Single Direction Motion, With Range Cover 50, 100 & 400 um

Fast & Stable Motion, Completed Within 10 ms

Support High-load Objective Lens Options; Provide Multiple Objective Lens Adapters

• Support Third-party Software And Hardware Control To Achieve Automatic Focusing

Capacitance (.C) & Resistance (.R) Position Sensor

Resolution Up To 0.2 nm

Support For Non-magnetic (.NM) And Ultra-high Vacuum (.UHV) Option Upgrades

Thtrough-hole · Scanner (Closed-loop)
Carrier.S & HS Series

Motion Mode Covers Linear Motion And Pitch Motion

• Comprehensive Support For Sports Forms: X, Z, XY, XYZ & ZTT

The Motion Range Covers 100um To 300um (Larger Range Can Be Customized)

Capacitance (.C) & Resistance (.R) Position Sensor

Resolution Up To 0.2 nm

Ultra-fast Motion Response & Long-term Fatigue Test

Support For Non-magnetic (.NM) And Ultra-high Vacuum (.UHV) Option Upgrades

Load Stage · Closed-loop · Carrier Series

Load Stage · Motion (Closed-loop)
Carrier.L7550.XY

• Linear Travle Range Covers 75mm × 50mm

• Optical Positioning Resolution 10 nm

• Maximum Load 2.5 kg

• Support Standard Microscope Stage Installation Connection

• Support For Non-magnetic (.NM) And Ultra-high Vacuum (.UHV) Option Upgrades

Load Stage · Rotation (Closed-loop)
Carrier.R200

• 360 Degree Continuous Rotation

• Closed-loop Positioning Resolution 1 urad

• Maximum Load 1 kg

• Support Standard Microscope Stage Installation Connection

• Support For Ultra-high Vacuum (.UHV) Option Upgrades