Motion · Closed-loop · Lab Series
Linear · Closed-loop
LSxx.Lab.X
• There Are Three External Dimensions To Choose From: 25mm, 35mm & 65mm
• Resistance Position Sensor (.R) And Optical Encoder Position Sensor (.O) Are Optional
• Support For Non-magnetic (.NM) And Ultra-high Vacuum (.UHV) Option Upgrades
• Controller Compatible With Rotator, Goniometer
Rotator · Closed-loop
RSxx.Lab.X
• There Are Three External Dimensions To Choose From: 35mm & 65mm
• Resistance Position Sensor (.R) And Optical Encoder Position Sensor (.O) Are Optional
• Support For Non-magnetic (.NM) And Ultra-high Vacuum (.UHV) Option Upgrades
• Controller Compatible With Linear, Goniometer
Goniometer · Closed-loop
GS65.Lab.X
• 65mm Standard Size
• Resistance Position Sensor (.R) And Optical Encoder Position Sensor (.O) Are Optional
• Support For Non-magnetic (.NM) And Ultra-high Vacuum (.UHV) Option Upgrades
• Controller Compatible With Linear, Rotator
Motion Stage · Closed-loop · Indus Series
Linear · Closed-loop
LSXXX.Indus
• 30, 60, 100, 120, 150 & 180 mm Travel Range Are Optional
• Nano-scale Position Sensor(.O), 1 nm / 10 nm Optional
• High Load, Support For Multiple Splicing Cases
• Supports Ultra-high Vacuum (.UHV) Option Upgrades
• Controller Compatible With Lab Series Linear, Rotator & Goniometer
扫描台·闭环
Compact · Scanner (Closed-loop)
S , SD & SH Series
• Extremely Compact Exterior Design; X, Z, XY & XYZ Motion Directions Are Covered
• The Motion Range Covers 100um To 300um (Larger Range Can Be Customized)
• Brand New Design Guarantees High Operating Frequency And Extremely Fast Response
• Capacitance (.C) & Resistance (.R) Position Sensor
• Resolution Up To 0.2 nm
• Support For Non-magnetic (.NM) And Ultra-high Vacuum (.UHV) Option Upgrades
Objective Lens · Scanner (Closed-loop)
Carrier.OB.Series
• Z-axis Single Direction Motion, With Range Cover 50, 100 & 400 um
• Fast & Stable Motion, Completed Within 10 ms
• Support High-load Objective Lens Options; Provide Multiple Objective Lens Adapters
• Support Third-party Software And Hardware Control To Achieve Automatic Focusing
• Capacitance (.C) & Resistance (.R) Position Sensor
• Resolution Up To 0.2 nm
• Support For Non-magnetic (.NM) And Ultra-high Vacuum (.UHV) Option Upgrades
Thtrough-hole · Scanner (Closed-loop)
Carrier.S & HS Series
• Motion Mode Covers Linear Motion And Pitch Motion
• Comprehensive Support For Sports Forms: X, Z, XY, XYZ & ZTT
• The Motion Range Covers 100um To 300um (Larger Range Can Be Customized)
• Capacitance (.C) & Resistance (.R) Position Sensor
• Resolution Up To 0.2 nm
• Ultra-fast Motion Response & Long-term Fatigue Test
• Support For Non-magnetic (.NM) And Ultra-high Vacuum (.UHV) Option Upgrades
Load Stage · Closed-loop · Carrier Series
Load Stage · Motion (Closed-loop)
Carrier.L7550.XY
• Linear Travle Range Covers 75mm × 50mm
• Optical Positioning Resolution 10 nm
• Maximum Load 2.5 kg
• Support Standard Microscope Stage Installation Connection
• Support For Non-magnetic (.NM) And Ultra-high Vacuum (.UHV) Option Upgrades
Load Stage · Rotation (Closed-loop)
Carrier.R200
• 360 Degree Continuous Rotation
• Closed-loop Positioning Resolution 1 urad
• Maximum Load 1 kg
• Support Standard Microscope Stage Installation Connection
• Support For Ultra-high Vacuum (.UHV) Option Upgrades